D w q G p o { D P i D N T M D K j B J n | b D R 8D ` N p 8D Report C Q & A

A. Principles of Plasma Generation, ,,B. Principles of Collisions,,C. Plasma Potential and Sheath,,D. RF Plasma and Self-bias,,E. Debye Shielding,,F. Plasma Oscillation,,G. Effect of Magnetic Field o

A. Principles of Plasma Generation, ,,B. Principles of Collisions,,C. Plasma Potential and Sheath,,D. RF Plasma and Self-bias,,E. Debye Shielding,,F. Plasma Oscillation,,G. Effect of Magnetic Field o

A. Principles of Plasma Generation, ,,B. Principles of Collisions,,C. Plasma Potential and Sheath,,D. RF Plasma and Self-bias,,E. Debye Shielding,,F. Plasma Oscillation,,G. Effect of Magnetic Field o

O H G [ t T z O H | F ] P B z A C p H K p H E p

1.Introduction of Cu/Low-k Interconnects ,,2.Copper Deposition , ,,3.Diffusion Barriers for Cu ,,4.Reliability Issues In Cu Metallization

1.Introduction of Cu/Low-k Interconnects ,,2.Copper Deposition , ,,3.Diffusion Barriers for Cu ,,4.Reliability Issues In Cu Metallization

1.Introduction of Cu/Low-k Interconnects ,,2.Copper Deposition , ,,3.Diffusion Barriers for Cu ,,4.Reliability Issues In Cu Metallization

1.Pinciple of CVD,,2.Metal-CVD,,3.PE-CVD,,4.HDP-CVD,,5.LP-CVD,,6.UHV-CVD